China Suppliers Factory: High-Performance Stainless Steel Vacuum Bellows for Optimal Vacuum Equipment Solutions
Product Functions
Adopting high-precision welding technology and a special sealing structure, they guarantee no leakage in high-vacuum environments ranging from 10⁻⁸ Pa·m³/s to 10⁻¹¹ Pa·m³/s, meeting the stringent requirements of industries such as semiconductors and photovoltaics.
Through the elastic deformation of the bellows, they absorb axial, lateral, and angular displacements, avoiding stress concentration in pipelines caused by thermal expansion/contraction or equipment vibrations, and extending the service life of the equipment.
The flexible structure can effectively reduce vibrations and noise transmitted by equipment such as vacuum pumps and turbomolecular pumps, enhancing the stability of system operation.
Made of stainless steel or special alloys, they are suitable for corrosive gases (such as acidic gases in CVD processes) and high-temperature environments (-200℃ to +450℃).
Application Range
Used in vacuum pipeline connections for equipment in wafer manufacturing, etching, coating (PVD/CVD), etc., ensuring high cleanliness and pollution-free transmission.
Connected to roots pumps, rotary vane pumps, molecular pumps, etc., to compensate for vibrations and thermal displacements and improve sealing performance.
In vacuum coating machines and electron beam welding equipment, they serve as flexible transition components between valves and chambers, preventing leakage risks caused by rigid connections.
Applied in precision instruments such as particle accelerators, electron microscopes, and vacuum freeze dryers to ensure the stability of high-vacuum environments.
Utilized in processes like solar cell coating and lithium battery vacuum drying, withstanding high temperatures and chemically corrosive environments.
Product Advantages
Meeting the requirements of ultra-high vacuum up to 10⁻¹¹Pa·m³/s without outgassing pollution.
Multi-layer bellows structure with fatigue resistance of ≥10,000 cycles.
Flanges (KF/CF), welding, or quick-connect interfaces, compatible with different vacuum standards (ISO/DIN).
Supporting customization of different calibers (DN10~DN500), lengths, and special materials (such as Hastelloy).
Frequently Asked Questions (FAQ)
Our vacuum bellows adopt high-precision welding technology and a special sealing structure, guaranteeing no leakage in high-vacuum environments ranging from 10⁻⁸ Pa·m³/s to 10⁻¹¹ Pa·m³/s.
They are made of high-quality stainless steel or special alloys, making them suitable for high-temperature environments ranging from -200℃ to +450℃ and resistant to chemically corrosive gases (such as acidic gases in CVD processes).
Through elastic deformation, they absorb axial, lateral, and angular displacements, which prevents stress concentration caused by thermal expansion/contraction or equipment vibrations. They also reduce vibration and noise from vacuum pumps and turbomolecular pumps.
Our vacuum bellows support multiple connection methods including KF/CF flanges, welding, and quick-connect interfaces, and they are fully compatible with ISO and DIN vacuum standards.
Yes. We support custom designs for different calibers ranging from DN10 to DN500, custom lengths, and special alloy materials like Hastelloy to meet specific system requirements.
Designed with a multi-layer bellows structure, our products feature high fatigue resistance, engineered to withstand a cycle life of ≥10,000 cycles under operating conditions.