Compensator
01
Bellows Compensator for the Power Vacuum Field
Product Functions
Vacuum Tightness: Adopting high-precision welding technology and a special sealing structure, they guarantee no leakage in high-vacuum environments ranging from 10⁻⁸ Pa·m³/s to 10⁻¹¹ Pa·m³/s, meeting the stringent requirements of industries such as semiconductors and photovoltaics.
Displacement Compensation: Through the elastic deformation of the bellows, they absorb axial, lateral, and angular displacements, avoiding stress concentration in pipelines caused by thermal expansion/contraction or equipment vibrations, and extending the service life of the equipment.
Vibration and Noise Reduction: The flexible structure can effectively reduce vibrations and noise transmitted by equipment such as vacuum pumps and turbomolecular pumps, enhancing the stability of system operation.
Corrosion and High-Temperature Resistance: Made of stainless steel or special alloys, they are suitable for corrosive gases (such as acidic gases in CVD processes) and high-temperature environments (-200℃ to +450℃).
Application Range
Semiconductor and Electronics Industry: Used in vacuum pipeline connections for equipment in wafer manufacturing, etching, coating (PVD/CVD), etc., ensuring high cleanliness and pollution-free transmission.
Vacuum Pump Systems: Connected to roots pumps, rotary vane pumps, molecular pumps, etc., to compensate for vibrations and thermal displacements and improve sealing performance.
Vacuum Valves and Chamber Connections: In vacuum coating machines and electron beam welding equipment, they serve as flexible transition components between valves and chambers, preventing leakage risks caused by rigid connections.
Scientific Research and Medical Equipment: Applied in precision instruments such as particle accelerators, electron microscopes, and vacuum freeze dryers to ensure the stability of high-vacuum environments.
New Energy and Photovoltaic Industry: Utilized in processes like solar cell coating and lithium battery vacuum drying, withstanding high temperatures and chemically corrosive environments.
Product Advantages
High Vacuum Adaptability: Meeting the requirements of ultra-high vacuum up to 10⁻¹¹Pa·m³/s without outgassing pollution.
Long-Life Design: Multi-layer bellows structure with fatigue resistance of ≥10,000 cycles.
Multiple Connection Methods: Flanges (KF/CF), welding, or quick-connect interfaces, compatible with different vacuum standards (ISO/DIN).
Customization Services: Supporting customization of different calibers (DN10~DN500), lengths, and special materials (such as Hastelloy).
Stainless steel vacuum bellows are key components ensuring the efficient and stable operation of vacuum equipment, suitable for industrial and scientific research fields with high cleanliness and precision requirements. For technical parameters or selection support, please contact our professional team!